Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process

标题
Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 87, Issue 4, Pages 610-613
出版商
Elsevier BV
发表日期
2009-09-03
DOI
10.1016/j.mee.2009.08.022

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