Article
Engineering, Electrical & Electronic
Ying Zhao, Shengrui Xu, Lansheng Feng, Ruoshi Peng, Xiaomeng Fan, Jinjuan Du, Huake Su, Jincheng Zhang, Yue Hao
Summary: This study investigated the properties of AlGaN/GaN heterojunction structures grown on nano-scale patterned sapphire substrates and planar sapphire substrates. Results showed that using sapphire substrates with concave nano-scale patterns improved the crystalline quality, surface morphology, and reduced dislocation. This led to an improvement in the mobility of the two-dimensional electron gas.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2022)
Article
Chemistry, Analytical
Kihyeun Kim, Ki Joong Lee, Na Rae Jo, Eun-Jung Jo, Yong-Beom Shin, Min-Gon Kim
Summary: This study demonstrates a fabrication strategy for wafer-scale LSPR substrates using reproducible and high-throughput techniques. The LSPR substrates are fabricated by nanoimprint lithography, wet-etching, and thin film deposition, and are applied for label-free detection of biomolecule binding events.
Article
Chemistry, Multidisciplinary
Mirko Lohse, Manuel W. Thesen, Anja Haase, Martin Smolka, Nerea Briz Iceta, Ana Ayerdi Izquierdo, Isbaal Ramos, Clarisa Salado, Arne Schleunitz
Summary: This study presents the fabrication process of a novel network of micron-sized channels using UV-nanoimprint lithography, along with an evaluation of a suitable UV-curable material. The results suggest that the given pattern, in combination with the resist, can lead to faster, cheaper, and more reliable drug screening.
Article
Optics
Huabin Yu, Hongfeng Jia, Zhongling Liu, Muhammad Hunain Memon, Meng Tian, Shi Fang, Danhao Wang, Haochen Zhang, Jianzhe Liu, Liang Xu, Tianpeng Yang, Long Wei, Zhaoliang Liao, Haiding Sun
Summary: The study successfully achieved high-quality Al(Ga)N epilayers by using a hybrid patterned sapphire substrate (HPSS), which can potentially lead to the development of high-efficiency and high-power UV LEDs in the future.
Review
Chemistry, Multidisciplinary
Shengjun Zhou, Xiaoyu Zhao, Peng Du, Ziqi Zhang, Xu Liu, Sheng Liu, L. Jay Guo
Summary: This review introduces the application of patterned sapphire substrates (PSS) in III-nitride emitters and summarizes the fabrication methods and nanoscale patterned structure definitions of PSS. Research shows that PSS can reduce the threading dislocation density (TDD) in epilayers and enhance the light extraction efficiency. The structural parameters of PSS also have an impact on LED performances. Finally, the challenges and potential prospects of PSS in future LED development are proposed.
Article
Chemistry, Multidisciplinary
Andre Mayer, Hella-Christin Scheer
Summary: Nanoimprint lithography allows for efficient filling of cavities without the need for etching, utilizing a strategy of 'partial cavity filling' contingent on an appropriate initial layer thickness. A guiding chart is provided to assist users in selecting the optimal initial layer thickness, considering factors such as volume conservation and potential instabilities during the imprint process. This tool is particularly useful for periodic stamp structures, providing a practical and straightforward approach to achieving defect-free processing.
Article
Chemistry, Physical
Achille Francone, Santos Merino, Aritz Retolaza, Jorge Ramiro, Sofia A. Alves, Joana Vieira de Castro, Nuno M. Neves, Ainara Arana, Jose M. Marimon, Clivia M. Sotomayor Torres, Nikolaos Kehagias
Summary: The development of antimicrobial surfaces is crucial in addressing current health crises such as the COVID-19 pandemic and antibiotic-resistant diseases. By introducing physical modifications to surfaces rather than relying on chemical agents, antibacterial properties can be enhanced to effectively combat bacterial attachment.
SURFACES AND INTERFACES
(2021)
Article
Nanoscience & Nanotechnology
Pengfei Cheng, Ronald Kampmann, Dong Wang, Stefan Sinzinger, Peter Schaaf
Summary: The study successfully fabricated high-quality, homogeneous arrays of inverted Si nanopyramids and Si nanopillars by precisely controlling the etching time and path. Experimental investigation of the optical properties indicates that the reflections of these Si nanostructures are mainly determined by their aspect ratio and period. Furthermore, visible-light scattering patterns on inverted Si nanopyramids and Si nanopillars can be precisely controlled by the nanostructures.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Optics
Jacob J. Ewing, Cheyenne Lynsky, Matthew S. Wong, Feng Wu, Yi Chao Chow, Pavel Shapturenka, Michel Iza, Shuji Nakamura, Steven P. Denbaars, James S. Speck
Summary: This article studied the method of achieving highly efficient long-wavelength InGaN LEDs through V-defect engineering, which utilized naturally occurring V-defects for lateral injection and improved the external quantum efficiency.
Article
Nanoscience & Nanotechnology
Jiyoung Moon, Masoud Alahbakhshi, Abouzar Gharajeh, Quanwei Li, Ross Haroldson, Sunah Kwon, Roberta Hawkins, Moon J. Kim, Walter Hu, Xiang Zhang, Anvar Zakhidov, Qing Gu
Summary: This study demonstrates the generation of quasi-continuous wave (quasi-CW) lasing from directly patterned perovskite cavities up to high temperatures using nanoimprint lithography and a thin layer of polycarbonate for encapsulation. The polycarbonate layer effectively protects the devices from surface defects and environmental hazards. The results suggest that achieving continuous wave (CW) lasing at room temperature from directly patterned perovskite cavities is within reach.
Article
Chemistry, Multidisciplinary
Shuo Zhang, Meng Liang, Yan Yan, Jinpeng Huang, Yan Li, Tao Feng, Xueliang Zhu, Zhicong Li, Chenke Xu, Junxi Wang, Jinmin Li, Zhiqiang Liu, Xiaoyan Yi
Summary: This study proposes the use of thin AlN prebuffer and transitional-refraction-index patterned sapphire substrate (TPSS) to improve the efficiency of LEDs. Experimental results show that this method significantly increases the light output power and efficiency of LEDs.
Article
Materials Science, Multidisciplinary
Aixing Li, Yufeng Li, Haifeng Yang, Minyan Zhang, Zhenhuan Tian, Qiang Li, Feng Yun
Summary: In this study, the excitation-dependent luminescence properties of InGaN/GaN light-emitting diodes with air-cavity arrays were investigated using scanning near-field optical microscopy. The effect of the air-cavity structure on the spatial distributions of light-extraction efficiency, internal quantum efficiency, and external quantum efficiency were quantified through experiments and numerical simulations. The results showed that the air-cavity areas exhibited higher light-extraction efficiency and reduced stress compared to flat areas.
OPTICAL MATERIALS EXPRESS
(2022)
Article
Physics, Applied
Fumihito Kato, Yu Sato, Hiroki Ato, Haruki Kuwabara, Yuto Kobayashi, Kensuke Nakamura, Noriyasu Masumoto, Hiroyuki Noguchi, Hirotsugu Ogi
Summary: This paper investigates the structural design of a wireless-electrodeless quartz crystal microbalance sensor, achieving a high-quality factor by optimizing micropillar arrangement to reduce structural damping. The high Q-factor was successfully demonstrated in experiments for detecting extremely low concentrations of hydrogen gas.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2021)
Article
Engineering, Electrical & Electronic
Takahiro Iwasaki, Hirokazu Miyoshi, Anupam Mitra, Masayuki Hatano, Kazuya Fukuhara, Motofumi Komori, Takuya Kono, Tetsuro Nakasugi
Summary: This paper introduces the development of spin-coating and flash imprint lithography (SC-FIL) to improve the productivity of nanoimprint lithography (NIL) in semiconductor manufacturing. By optimizing the process, the goal of high throughput and low defect density is achieved.
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
(2022)
Proceedings Paper
Computer Science, Artificial Intelligence
Hirotoshi Torii, Mitsuru Hiura, Yukio Takabayashi, Atsushi Kimura, Yoshio Suzaki, Toshiki Ito, Kiyohito Yamamoto, Jin Choi, Teresa Estrada
Summary: Imprint lithography is an effective technique for replicating nano-scale features, offering higher resolution and uniformity compared to photolithography equipment. It has a simpler design, lower cost, and reduced waste. Efforts are being made to further improve its performance and develop pattern transfer processes to address edge placement error.
NOVEL PATTERNING TECHNOLOGIES 2022
(2022)
Article
Nanoscience & Nanotechnology
Sehoon Chang, Ggoch Ddeul Han, Jonathan G. Weis, Hyoungwon Park, Olivia Hentz, Zhibo Zhao, Timothy M. Swager, Silvija Gradecak
ACS APPLIED MATERIALS & INTERFACES
(2016)
Article
Chemistry, Multidisciplinary
Stefanie Klein, Melek Kizaloglu, Luis Portilla, Hyoungwon Park, Tobias Rejek, Julian Huemmer, Karsten Meyer, Rainer Hock, Luitpold V. R. Distel, Marcus Halik, Carola Kryschi
Article
Chemistry, Physical
Markus Licklederer, Reza Mohammadi, Nhat Truong Nguyen, Hyoungwon Park, Seyedsina Hejazi, Marcus Halik, Nicolas Vogel, Marco Altomare, Patrik Schmuki
JOURNAL OF PHYSICAL CHEMISTRY C
(2019)
Article
Nanoscience & Nanotechnology
Baolin Zhao, Bastian Gothe, Marco Sarcletti, Yuhan Zhao, Tobias Rejek, Xin Liu, Hyoungwon Park, Peter Strohriegl, Marcus Halik
ADVANCED ELECTRONIC MATERIALS
(2020)
Article
Chemistry, Multidisciplinary
Yuanyuan Cao, Tobias Waehler, Hyoungwon Park, Johannes Will, Annemarie Prihoda, Narine Moses Badlyan, Lukas Fromm, Tadahiro Yokosawa, Bingzhe Wang, Dirk M. Guldi, Andreas Goerling, Janina Maultzsch, Tobias Unruh, Erdmann Spiecker, Marcus Halik, Joerg Libuda, Julien Bachmann
ADVANCED MATERIALS INTERFACES
(2020)
Article
Materials Science, Multidisciplinary
Baolin Zhao, Mikhail Feofanov, Dominik Lungerich, Hyoungwon Park, Tobias Rejek, Judith Wittmann, Marco Sarcletti, Konstantin Amsharov, Marcus Halik
FRONTIERS OF MATERIALS SCIENCE
(2020)
Article
Materials Science, Multidisciplinary
Marco Sarcletti, Hyoungwon Park, Janis Wirth, Silvan Englisch, Andreas Eigen, Dominik Drobek, Dustin Vivod, Bernhard Friedrich, Rainer Tietze, Christoph Alexiou, Dirk Zahn, Benjamin Apeleo Zubiri, Erdmann Spiecker, Marcus Halik
Summary: Research has shown that the use of custom-made superparamagnetic iron oxide nanoparticles can effectively remove nano-/microplastics pollutants of different origins, properties, and mixtures, with the best remediation performance for mixed nanoparticles. This method utilizes magnetic attraction and removal of nano-/microplastics, demonstrating universality and scalability, enabling effective remediation of contamination in water environments.
Article
Chemistry, Analytical
Jae-Hun Kim, Hyoungwon Park, Ali Mirzaei, Myung Gwan Hahm, Sanghoon Ahn, Marcus Halik, Changkyoo Park, Sang Sub Kim
Summary: Generating oxygen vacancies on SnO2 nanowires by femtosecond laser irradiation can enhance gas sensing properties, improving response to NO2 and toluene gases. Lower laser pulse energy leads to better sensing performance.
SENSORS AND ACTUATORS B-CHEMICAL
(2021)
Article
Chemistry, Multidisciplinary
Muhammad Ali, Evgeny Kataev, Johannes Mueller, Hyoungwon Park, Marcus Halik, Andreas Hirsch
Summary: The study focuses on hydrogen bonding interactions at the level of functionalized nanoparticles, showing enhanced binding affinities through orthogonal functionalization using receptors with multiple hydrogen bonding motifs. The modified surfaces of superparamagnetic iron oxide nanoparticles were fully characterized, with the number of attached ligands determined. The host-guest interactions on the surface showed significantly stronger binding affinities compared to molecular interactions in solution.
CHEMISTRY-A EUROPEAN JOURNAL
(2021)
Article
Chemistry, Multidisciplinary
Hyoungwon Park, Jae-Hun Kim, Dustin Vivod, Sungil Kim, Ali Mirzaei, Dirk Zahn, Changkyoo Park, Sang Sub Kim, Marcus Halik
Summary: This study enhanced the sensing capabilities of semiconducting metal oxide-based gas sensors through a new post-modification method, improving gas selectivity; the chemical-affinity-driven interaction between SAM and gas molecules enabled selective gas sensing.
Article
Chemistry, Analytical
Hyoungwon Park, Jae-Hun Kim, Won-Sang Shin, Ali Mirzaei, Yoon-Jun Kim, Sang Sub Kim, Marcus Halik, Changkyoo Park
Summary: This study proposes an effective strategy to improve the selectivity and response of SnO2 nanowire-based gas sensors by adopting self-assembled monolayer functionalization and post-treatment femtosecond laser irradiation. The functionalization enhances gas selectivity by tuning surface chemical states, while the laser irradiation creates embossing surfaces and twin structures, improving gas adsorption and response.
SENSORS AND ACTUATORS B-CHEMICAL
(2022)
Article
Optics
Hyun Jong Yoo, Hyoungwon Park, Jeoung Han Kim, Changkyoo Park
Summary: In this study, a kilowatt level nanosecond pulsed laser was used to remove the paint layer on the surface of 304L stainless steel (SS304L). Different numbers of laser paint removal (LPR) process repetitions were applied and their influences on SS304L were analyzed. The complete removal of the paint layer was confirmed for nine (LPR 9) and twelve (LPR 12) repetitions using an electron probe X-ray microanalyzer (EPMA). Moreover, the LPR-induced microstructural modification was investigated using electron backscatter diffraction (EBSD), revealing smaller grain size and larger strain rate for a higher number of LPR process.
OPTICS AND LASER TECHNOLOGY
(2023)
Article
Chemistry, Multidisciplinary
Henrik Gass, Marco Sarcletti, Lukas Mueller, Sabine Huebner, Tadahiro Yokosawa, Hyoungwon Park, Thomas Przybilla, Erdmann Spiecker, Marcus Halik
Summary: Besides their CO2 emissions when burned, hydrocarbons (HCs) are essential raw materials and commodities. HCs act as persistent pollutants with water as the main carrier, whether in the form of liquid oil spills or the abundance of plastic waste in the oceans. This study presents a water remediation method using superparamagnetic iron oxide nanoparticles (SPIONs) modified with self-assembled monolayers to effectively bind with HCs of different appearances and properties. The interaction relies on hydrophobic and Coulomb forces, enabling the recycling of SPIONs and their simple magnetic separation from water. The collected plastic waste also exhibits superior adsorption properties for crude oil, thus achieving upcycling. This surface modification approach allows the agglomeration and removal of organic contaminants from water, enabling a complete recycling loop.
Article
Green & Sustainable Science & Technology
Hyoungwon Park, Alexander May, Luis Portilla, Hanno Dietrich, Friedrich Muench, Tobias Rejek, Marco Sarcletti, Leena Banspach, Dirk Zahn, Marcus Halik
NATURE SUSTAINABILITY
(2020)
Meeting Abstract
Chemistry, Multidisciplinary
Hyoungwon Park, Marco Sarcletti, Marcus Halik
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
(2019)
Article
Engineering, Electrical & Electronic
Bruno Galizia, Patrick Fiorenza, Corrado Bongiorno, Bela Pecz, Zsolt Fogarassy, Emanuela Schiliro, Filippo Giannazzo, Fabrizio Roccaforte, Raffaella Lo Nigro
Summary: This study demonstrates the growth of oriented AlN thin films on 4H-SiC substrates using PE-ALD technique, and investigates the impact of NH3 plasma pulsing on the microstructure and orientation degree of the AlN layers. The structural characterization reveals different polymorphic structures depending on the NH3 plasma pulsing time, and electrical nanoscopic characterization shows a correlation between the AlN crystalline phases and the insulating properties.
MICROELECTRONIC ENGINEERING
(2024)
Article
Engineering, Electrical & Electronic
Theo Levert, Alter Zakhtser, Julien Duval, Chloe Raguenez, Stephane Verdier, Delphine Le Cunff, Jean-Herve Tortai, Bernard Pelissier
Summary: In this study, the robustness of optical constants and optical band gap determination of three different materials is compared using a combination of spectroscopic ellipsometry and energy loss signal of X-ray photoelectron spectroscopy. The hybridization of these two techniques provides a new robust method for determining the band gap of the studied materials and other optical properties over a wide energy range.
MICROELECTRONIC ENGINEERING
(2024)
