High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer

标题
High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer
作者
关键词
-
出版物
Soft Matter
Volume 4, Issue 1, Pages 168-176
出版商
Royal Society of Chemistry (RSC)
发表日期
2007-11-20
DOI
10.1039/b711506g

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