期刊
THIN SOLID FILMS
卷 517, 期 14, 页码 4104-4107出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2009.01.164
关键词
Metal nano-pattern; Flexible substrate; PET (polyethylene-terephthalate); PVA (poly-vinyl alcohol); Bi-layer imprint
类别
资金
- National Research Foundation of Korea [14-2008-01-001-00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the liftoff process. as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films. (C) 2009 Elsevier B.V. All rights reserved.
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