Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
出版年份 2016 全文链接
标题
Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
作者
关键词
-
出版物
Materials
Volume 9, Issue 12, Pages 1007
出版商
MDPI AG
发表日期
2016-12-13
DOI
10.3390/ma9121007
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