Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride

标题
Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
作者
关键词
-
出版物
Journal of Physical Chemistry Letters
Volume 6, Issue 18, Pages 3610-3614
出版商
American Chemical Society (ACS)
发表日期
2015-08-31
DOI
10.1021/acs.jpclett.5b01596

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