Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers

标题
Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 7, Issue 40, Pages 22525-22532
出版商
American Chemical Society (ACS)
发表日期
2015-09-22
DOI
10.1021/acsami.5b06801

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