Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance
出版年份 2022 全文链接
标题
Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 597, Issue -, Pages 153703
出版商
Elsevier BV
发表日期
2022-05-18
DOI
10.1016/j.apsusc.2022.153703
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Chemical mechanical polishing for sapphire wafers using a developed slurry
- (2021) Zhenyu Zhang et al. Journal of Manufacturing Processes
- Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries
- (2021) Qixiang Zhang et al. WEAR
- Improvement in chemical mechanical polishing of 4H-SiC wafer by activating persulfate through the synergistic effect of UV and TiO2
- (2021) Wantang Wang et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
- Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect
- (2021) Wantang Wang et al. APPLIED SURFACE SCIENCE
- A novel slurry for chemical mechanical polishing of single crystal diamond
- (2021) Longxing Liao et al. APPLIED SURFACE SCIENCE
- Rheophysical study of dispersed alumina suspensions
- (2021) Florian Boutenel et al. POWDER TECHNOLOGY
- The Effect of Surface Polarity on the CMP Behavior of 6H-SiC Substrates
- (2020) Guomei Chen et al. RUSSIAN JOURNAL OF APPLIED CHEMISTRY
- Surface modulation to enhance chemical mechanical polishing performance of sliced silicon carbide Si-face
- (2020) Gaopan Chen et al. APPLIED SURFACE SCIENCE
- Complexes of fluorinated, silicone and hydrocarbon surfactants with carboxymethylcellulose and their influence on properties of the alumina suspension
- (2019) Jakub Matusiak et al. COLLOID AND POLYMER SCIENCE
- Ultrahigh Recovery of Fracture Strength on Mismatched Fractured Amorphous Surfaces of Silicon Carbide
- (2019) Junfeng Cui et al. ACS Nano
- Novel polystyrene/CeO2-TiO2 multicomponent core/shell abrasives for high-efficiency and high-quality photocatalytic-assisted chemical mechanical polishing of reaction-bonded silicon carbide
- (2019) Bo Gao et al. APPLIED SURFACE SCIENCE
- Unprecedented Piezoresistance Coefficient in Strained Silicon Carbide
- (2019) Junfeng Cui et al. NANO LETTERS
- Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy
- (2019) Zhenyu Zhang et al. APPLIED SURFACE SCIENCE
- A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry
- (2018) Zhenyu Zhang et al. APPLIED SURFACE SCIENCE
- Mechanism of Reduced Sintering Temperature of Al2O3–ZrO2 Nanocomposites Obtained by Microwave Hydrothermal Synthesis
- (2018) Iwona Koltsov et al. Materials
- Synthesis of sodium polyacrylate copolymers as water-based dispersants for ultrafine grinding of praseodymium zirconium silicate
- (2018) Guanghua Huang et al. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
- Environment friendly chemical mechanical polishing of copper
- (2018) Zhenyu Zhang et al. APPLIED SURFACE SCIENCE
- Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder
- (2018) Tianxian Wang et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Review of Silicon Carbide Power Devices and Their Applications
- (2017) Xu She et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Synthesis and mechanism study of gelatin grafted acetone formaldehyde sulphonates as oil-well cement dispersant
- (2017) Chengwen Wang et al. RSC Advances
- Hollow microspheres Mg-doped ZrO 2 nanoparticles: Green assisted synthesis and applications in photocatalysis and photoluminescence
- (2016) L. Renuka et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Performance of colloidal silica and ceria based slurries on CMP of Si-face 6H-SiC substrates
- (2015) Guomei Chen et al. APPLIED SURFACE SCIENCE
- Role of ionic strength in chemical mechanical polishing of silicon carbide using silica slurries
- (2014) Uma Rames Krishna Lagudu et al. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
- Effects of CMP slurry additives on the agglomeration of alumina nanoparticles 1: General aggregation rate behavior
- (2013) Neil Brahma et al. JOURNAL OF COLLOID AND INTERFACE SCIENCE
- Hydrogen Generation by Hydrolysis of an Al/Al2O3-Composite Powder After Heat Treatment
- (2013) Xiani Huang et al. Energy Technology
- Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials
- (2012) Hideo Aida et al. CURRENT APPLIED PHYSICS
- Hamaker 2: A Toolkit for the Calculation of Particle Interactions and Suspension Stability and its Application to Mullite Synthesis by Colloidal Methods
- (2011) Ulrich Aschauer et al. JOURNAL OF DISPERSION SCIENCE AND TECHNOLOGY
- Poly(acrylic acid) as a rheology modifier for dense alumina dispersions in high ionic strength environments
- (2010) Prasad S. Bhosale et al. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
- Efficiency of different dispersing devices for dispersing nanosized silica and alumina
- (2010) Carsten Schilde et al. POWDER TECHNOLOGY
- Chemical effect on the material removal rate in the CMP of silicon wafers
- (2010) Y.G. Wang et al. WEAR
- Preparation of α-alumina/polymethacrylic acid composite abrasive and its CMP performance on glass substrate
- (2008) Zefang Zhang et al. MICROELECTRONIC ENGINEERING
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now