Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder

出版年份 2018 全文链接

标题

作者

关键词

Novel inorganic polyelectrolyte, Composite abrasive, Chemical mechanical polishing, High material removal rate, Mechanism, Sapphire

出版物

Volume 782, Issue -, Pages 709-715

出版商

Elsevier BV

发表日期

2018-12-20

DOI

10.1016/j.jallcom.2018.11.416

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