标题
A novel slurry for chemical mechanical polishing of single crystal diamond
作者
关键词
Single crystal diamond, Chemical mechanical polishing, Slurry, Surface roughness
出版物
APPLIED SURFACE SCIENCE
Volume 564, Issue -, Pages 150431
出版商
Elsevier BV
发表日期
2021-06-22
DOI
10.1016/j.apsusc.2021.150431
参考文献
相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。- Achieving large uniform tensile elasticity in microfabricated diamond
- (2021) Chaoqun Dang et al. SCIENCE
- Photoelectrical imaging and coherent spin-state readout of single nitrogen-vacancy centers in diamond
- (2019) Petr Siyushev et al. SCIENCE
- Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition
- (2019) Guangyu Yan et al. APPLIED SURFACE SCIENCE
- Sub-nanoscale polishing of single crystal diamond(100) and the chemical behavior of nanoparticles during the polishing process
- (2019) Song Yuan et al. DIAMOND AND RELATED MATERIALS
- Extreme diamond-based quantum sensors
- (2019) James J. Hamlin et al. SCIENCE
- Redox agent enhanced chemical mechanical polishing of thin film diamond
- (2018) Soumen Mandal et al. CARBON
- Surface damage of single-crystal diamond (100) processed based on a sol-gel polishing tool
- (2018) Yingchao Lin et al. DIAMOND AND RELATED MATERIALS
- Chemical kinetics mechanism for chemical mechanical polishing diamond and its related hard-inert materials
- (2017) Zewei Yuan et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Characterizations of etch pits formed on single crystal diamond surface using oxygen/hydrogen plasma surface treatment
- (2016) Nobuteru Tsubouchi et al. DIAMOND AND RELATED MATERIALS
- Surface smoothing of a polycrystalline diamond using an iron plate-H 2 O 2 chemical reaction
- (2016) Akihisa Kubota et al. DIAMOND AND RELATED MATERIALS
- Improvement of material removal rate of single-crystal diamond by polishing using H2O2 solution
- (2016) Akihisa Kubota et al. DIAMOND AND RELATED MATERIALS
- Silica based polishing of {100} and {111} single crystal diamond
- (2014) Evan L H Thomas et al. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
- Chemical mechanical polishing of thin film diamond
- (2013) Evan L.H. Thomas et al. CARBON
- Analysis of laser-generated plasma ionizing radiation by synthetic single crystal diamond detectors
- (2012) M. Marinelli et al. APPLIED SURFACE SCIENCE
- Diamond polishing
- (2012) Thomas Schuelke et al. DIAMOND AND RELATED MATERIALS
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