Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

标题
Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials
作者
关键词
-
出版物
CURRENT APPLIED PHYSICS
Volume 12, Issue -, Pages S41-S46
出版商
Elsevier BV
发表日期
2012-02-21
DOI
10.1016/j.cap.2012.02.016

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