Electrostatic Self-Assembled Composite Abrasives for Chemical Mechanical Polishing of A-Plane Sapphire
出版年份 2021 全文链接
标题
Electrostatic Self-Assembled Composite Abrasives for Chemical Mechanical Polishing of A-Plane Sapphire
作者
关键词
-
出版物
ECS Journal of Solid State Science and Technology
Volume 10, Issue 11, Pages 114002
出版商
The Electrochemical Society
发表日期
2021-11-16
DOI
10.1149/2162-8777/ac39a6
参考文献
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