A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing

出版年份 2015 全文链接

标题

作者

关键词

Sapphire substrate, Chemical–mechanical polishing, Step-terrace structure, Chemical products, Material removal mechanism

出版物

SURFACE & COATINGS TECHNOLOGY

Volume 270, Issue -, Pages 206-220

出版商

Elsevier BV

发表日期

2015-03-08

DOI

10.1016/j.surfcoat.2015.02.053

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