Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate

标题
Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate
作者
关键词
-
出版物
JOURNAL OF INORGANIC MATERIALS
Volume 32, Issue 10, Pages 1109
出版商
Shanghai Institute of Ceramics
发表日期
2017-10-09
DOI
10.15541/jim20170036

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