Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2

标题
Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 53, Issue 18, Pages 185201
出版商
IOP Publishing
发表日期
2020-01-21
DOI
10.1088/1361-6463/ab6d97

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