Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms
出版年份 2015 全文链接
标题
Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 86, Issue 5, Pages 053504
出版商
AIP Publishing
发表日期
2015-05-27
DOI
10.1063/1.4921399
参考文献
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