Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

标题
Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 22, Issue 6, Pages 065009
出版商
IOP Publishing
发表日期
2013-11-12
DOI
10.1088/0963-0252/22/6/065009

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