Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

标题
Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 2, Pages 021303
出版商
American Vacuum Society
发表日期
2019-02-12
DOI
10.1116/1.5056205

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