Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges
出版年份 2011 全文链接
标题
Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 18, Issue 1, Pages 013503
出版商
AIP Publishing
发表日期
2011-01-12
DOI
10.1063/1.3535542
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
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