Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor
出版年份 2013 全文链接
标题
Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor
作者
关键词
-
出版物
Processes
Volume 1, Issue 2, Pages 128-152
出版商
MDPI AG
发表日期
2013-08-20
DOI
10.3390/pr1020128
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Modeling ALD Surface Reaction and Process Dynamics using Absolute Reaction Rate Theory
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