Quartz Crystal Microbalance Studies of Al2O3Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C†

出版年份 2009 全文链接

标题

Quartz Crystal Microbalance Studies of Al2O3Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C†

作者

关键词

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出版物

JOURNAL OF PHYSICAL CHEMISTRY A

Volume 114, Issue 3, Pages 1281-1289

出版商

American Chemical Society (ACS)

发表日期

2009-09-17

DOI

10.1021/jp9049268

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