Applications of atomic layer deposition to nanofabrication and emerging nanodevices

标题
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 8, Pages 2563-2580
出版商
Elsevier BV
发表日期
2008-09-14
DOI
10.1016/j.tsf.2008.09.007

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