Simple model for atomic layer deposition precursor reaction and transport in a viscous-flow tubular reactor

Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition

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Surface Loss in Ozone-Based Atomic Layer Deposition Processes

(2011) Harm C.M. Knoops et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Fe2O3 Using Ferrocene and Ozone

(2011) Alex B. F. Martinson et al.   Journal of Physical Chemistry C

Development of a multiscale model for an atomic layer deposition process

(2010) Raymond A. Adomaitis   JOURNAL OF CRYSTAL GROWTH

Conformality of Plasma-Assisted ALD: Physical Processes and Modeling

(2010) H. C. M. Knoops et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Modeling the Conformality of Atomic Layer Deposition: The Effect of Sticking Probability

(2009) J. Dendooven et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY