A model-based methodology for the analysis and design of atomic layer deposition processes—Part I: Mechanistic modelling of continuous flow reactors

出版年份 2012 全文链接

标题

作者

关键词

出版物

Volume 81, Issue -, Pages 260-272

出版商

Elsevier BV

发表日期

2012-07-22

DOI

10.1016/j.ces.2012.07.015

Discuss science. Find collaborators. Network.

Join a conversation

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started