Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

出版年份 2017 全文链接

标题

作者

关键词

Aluminum scandium nitride films, Pulse magnetron sputtering, Structure, Piezoelectric properties, Young's modulus

出版物

Volume 309, Issue -, Pages 417-422

出版商

Elsevier BV

发表日期

2016-11-25

DOI

10.1016/j.surfcoat.2016.11.083

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