Growth of highly c-axis oriented (B, Al)N film on diamond for high frequency surface acoustic wave devices

标题
Growth of highly c-axis oriented (B, Al)N film on diamond for high frequency surface acoustic wave devices
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 6, Pages 2247-2250
出版商
Elsevier BV
发表日期
2011-09-01
DOI
10.1016/j.tsf.2011.08.090

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