Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

(2012) A. Ababneh et al.   APPLIED SURFACE SCIENCE

Enhanced thermal conductivity of polycrystalline aluminum nitride thin films by optimizing the interface structure

(2012) T. S. Pan et al.   JOURNAL OF APPLIED PHYSICS

Properties of AlN grown by plasma enhanced atomic layer deposition

(2011) Markus Bosund et al.   APPLIED SURFACE SCIENCE

Electrical characteristics of insulating aluminum nitride MIS nanostructures

(2011) Bassam Abdallah et al.   APPLIED SURFACE SCIENCE

Deposition of ultrathin AlN films for high frequency electroacoustic devices

(2011) Valery V. Felmetsger et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Piezoelectric characteristic of nanocrystalline AlN films obtained by pulsed laser deposition at room temperature

(2010) C. Cibert et al.   APPLIED PHYSICS LETTERS

Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates

(2010) A. Bittner et al.   APPLIED SURFACE SCIENCE

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

(2010) A. Ababneh et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

SRIM – The stopping and range of ions in matter (2010)

(2010) James F. Ziegler et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Piezoelectric MEMS sensors: state-of-the-art and perspectives

(2009) S Tadigadapa et al.   MEASUREMENT SCIENCE and TECHNOLOGY

AlN films sputtered on iridium electrodes for bulk acoustic wave resonators

(2009) M. Clement et al.   THIN SOLID FILMS