Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

出版年份 2013 全文链接

标题

Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

作者

关键词

-

出版物

MICROELECTRONIC ENGINEERING

Volume 112, Issue -, Pages 193-197

出版商

Elsevier BV

发表日期

2013-04-17

DOI

10.1016/j.mee.2013.04.007

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