MoS2 functionalization for ultra-thin atomic layer deposited dielectrics
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Title
MoS2 functionalization for ultra-thin atomic layer deposited dielectrics
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 11, Pages 111601
Publisher
AIP Publishing
Online
2014-03-20
DOI
10.1063/1.4869149
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Related references
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- Trimethyl-aluminum and ozone interactions with graphite in atomic layer deposition of Al2O3
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- (2008) C. L. Hinkle et al. APPLIED PHYSICS LETTERS
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