The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition
Published 2012 View Full Article
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Title
The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 15, Pages 152115
Publisher
AIP Publishing
Online
2012-04-14
DOI
10.1063/1.3703595
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