Characteristics of high-k Al2O3 dielectric using ozone-based atomic layer deposition for dual-gated graphene devices

Title
Characteristics of high-k Al2O3 dielectric using ozone-based atomic layer deposition for dual-gated graphene devices
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 4, Pages 043107
Publisher
AIP Publishing
Online
2010-07-29
DOI
10.1063/1.3467454

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