Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
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Title
Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 9, Pages 094103
Publisher
AIP Publishing
Online
2012-03-01
DOI
10.1063/1.3690870
References
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Related references
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- (2011) Julian Schulze et al. APPLIED PHYSICS LETTERS
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- (2011) B. Bora et al. PHYSICS OF PLASMAS
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- (2011) Deuk-Chul Kwon et al. PHYSICS OF PLASMAS
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- (2011) I V Schweigert et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges
- (2010) D Ziegler et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges
- (2009) Z. Donkó et al. APPLIED PHYSICS LETTERS
- Electron Beams in Capacitively Coupled Radio-Frequency Discharges
- (2008) J. Schulze et al. IEEE TRANSACTIONS ON PLASMA SCIENCE
- Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures
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- Stochastic heating in asymmetric capacitively coupled RF discharges
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- On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric
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- PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
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- Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach
- (2008) T. Mussenbrock et al. PHYSICAL REVIEW LETTERS
- The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges
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- Nonlinear dynamics of dual frequency capacitive discharges: a global model matched to an experiment
- (2008) Dennis Ziegler et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
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