Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates
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Title
Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates
Authors
Keywords
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Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 17, Issue 01, Pages 1
Publisher
SPIE-Intl Soc Optical Eng
Online
2018-03-24
DOI
10.1117/1.jmm.17.1.015005
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