Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates
出版年份 2018 全文链接
标题
Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 17, Issue 01, Pages 1
出版商
SPIE-Intl Soc Optical Eng
发表日期
2018-03-24
DOI
10.1117/1.jmm.17.1.015005
参考文献
相关参考文献
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