First principles study of the atomic layer deposition of alumina by TMA–H2O-process

Cooperation between adsorbates accounts for the activation of atomic layer deposition reactions

(2015) Mahdi Shirazi et al.   Nanoscale

Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory

(2013) Mahdi Shirazi et al.   JOURNAL OF COMPUTATIONAL CHEMISTRY

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Accurate Molecular Van Der Waals Interactions from Ground-State Electron Density and Free-Atom Reference Data

(2009) Alexandre Tkatchenko et al.   PHYSICAL REVIEW LETTERS

Erratum to “Al2O3 thin film growth on Si (100) using binary reaction sequence chemistry” [Thin Solid Films 292 (1997) 135–144]

(2009) A.W. Ott et al.   THIN SOLID FILMS

Insights into Crystalline Preorganization of Gas-Phase Precursors: Densification Mechanisms

(2008) Stéphane Olivier et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Hafnium Oxide from Hafnium Chloride and Water

(2008) Atashi B. Mukhopadhyay et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY