Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems

Low temperature aluminum nitride thin films for sensory applications

(2016) E. Yarar et al.   AIP Advances

Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride

(2015) Viktor Hrkac et al.   JOURNAL OF APPLIED PHYSICS

A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers

(2015) Yipeng Lu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Erratum: Piezoelectric coefficients and spontaneous polarization of ScAlN (2015J. Phys. Condens. Matter27 245901)

(2015) Miguel A Caro et al.   JOURNAL OF PHYSICS-CONDENSED MATTER

Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications

(2015) Simon Fichtner et al.   APL Materials

Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary

(2014) Takahiko Yanagitani et al.   APPLIED PHYSICS LETTERS

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

(2014) P. M. Mayrhofer et al.   JOURNAL OF APPLIED PHYSICS

Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

(2013) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

(2013) R. Matloub et al.   APPLIED PHYSICS LETTERS

Tunable optoelectronic and ferroelectric properties in Sc-based III-nitrides

(2013) Siyuan Zhang et al.   JOURNAL OF APPLIED PHYSICS

Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

(2012) M. Schneider et al.   APPLIED PHYSICS LETTERS

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

(2012) Agne Zukauskaite et al.   JOURNAL OF APPLIED PHYSICS

Piezoelectric aluminum nitride thin films for microelectromechanical systems

(2012) Gianluca Piazza et al.   MRS BULLETIN

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

(2009) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

(2008) Morito Akiyama et al.   ADVANCED MATERIALS

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

(2008) Morito Akiyama et al.   APPLIED PHYSICS LETTERS