A facile and low-cost route to high-aspect-ratio microstructures on silicon via a judicious combination of flow-enabled self-assembly and metal-assisted chemical etching

Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching

(2016) L. Romano et al.   RSC Advances

Flow-Enabled Self-Assembly of Large-Scale Aligned Nanowires

(2015) Bo Li et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Uniform trench arrays with controllable tilted profiles using metal-assisted chemical etching

(2015) Chia-Yun Chen et al.   APPLIED SURFACE SCIENCE

Charge Transport in Uniform Metal-Assisted Chemical Etching for 3D High-Aspect-Ratio Micro- and Nanofabrication on Silicon

(2015) Liyi Li et al.   ECS Journal of Solid State Science and Technology

Deep Etching of Single- and Polycrystalline Silicon with High Speed, High Aspect Ratio, High Uniformity, and 3D Complexity by Electric Bias-Attenuated Metal-Assisted Chemical Etching (EMaCE)

(2014) Liyi Li et al.   ACS Applied Materials & Interfaces

Crafting Threads of Diblock Copolymer Micelles via Flow-Enabled Self-Assembly

(2014) Bo Li et al.   ACS Nano

Etching Silicon with HF-H2O2-Based Mixtures: Reactivity Studies and Surface Investigations

(2014) Christoph Gondek et al.   Journal of Physical Chemistry C

Scalable synthesis of silicon nanosheets from sand as an anode for Li-ion batteries

(2014) Won-Sik Kim et al.   Nanoscale

Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts

(2013) Liyi Li et al.   ACS Applied Materials & Interfaces

Drying-Mediated Assembly of Colloidal Nanoparticles into Large-Scale Microchannels

(2013) Wei Han et al.   ACS Nano

Metal-assisted homogeneous etching of single crystal silicon: A novel approach to obtain an ultra-thin silicon wafer

(2013) Fan Bai et al.   APPLIED SURFACE SCIENCE

Block Copolymer Lithography

(2013) Christopher M. Bates et al.   MACROMOLECULES

Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

(2013) Jayalakshmi Parasuraman et al.   MICROELECTRONIC ENGINEERING

3D Spirals with Controlled Chirality Fabricated Using Metal-Assisted Chemical Etching of Silicon

(2012) Owen J. Hildreth et al.   ACS Nano

High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

(2012) Xiaodan Gu et al.   ADVANCED MATERIALS

Model for the Mass Transport during Metal-Assisted Chemical Etching with Contiguous Metal Films As Catalysts

(2012) Nadine Geyer et al.   Journal of Physical Chemistry C

New Silicon Architectures by Gold-Assisted Chemical Etching

(2011) Bechelany Mikhael et al.   ACS Applied Materials & Interfaces

A continuous process for Si nanowires with prescribed lengths

(2011) Jungkil Kim et al.   JOURNAL OF MATERIALS CHEMISTRY

Hybridizing ZnO Nanowires with Micropyramid Silicon Wafers as Superhydrophobic High-Efficiency Solar Cells

(2011) Yan Liu et al.   Advanced Energy Materials

Fabrication of High Aspect Ratio TSV and Assembly With Fine-Pitch Low-Cost Solder Microbump for Si Interposer Technology With High-Density Interconnects

(2011) Aibin Yu et al.   IEEE Transactions on Components Packaging and Manufacturing Technology

Metal-Catalyzed Etching of Vertically Aligned Polysilicon and Amorphous Silicon Nanowire Arrays by Etching Direction Confinement

(2010) Shih-wei Chang et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

Influence of pre-surface treatment on the morphology of silicon nanowires fabricated by metal-assisted etching

(2010) Shu-Chia Shiu et al.   APPLIED SURFACE SCIENCE

Fabrication of AD/DA microfluidic converter using deep reactive ion etching of silicon and low temperature wafer bonding

(2010) Chang Wu et al.   MICROELECTRONIC ENGINEERING

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

(2009) Nacéra Megouda et al.   APPLIED SURFACE SCIENCE

Simple Approach to Wafer-Scale Self-Cleaning Antireflective Silicon Surfaces

(2009) Dianpeng Qi et al.   LANGMUIR

High-Density Through Silicon Vias for 3-D LSIs

(2009) Mitsumasa Koyanagi et al.   PROCEEDINGS OF THE IEEE

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA

Self-Assembling Semicrystalline Polymer into Highly Ordered, Microscopic Concentric Rings by Evaporation

(2008) Myunghwan Byun et al.   LANGMUIR