Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

Published 2009 View Full Article

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Title
Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 12, Pages 6210-6216
Publisher
Elsevier BV
Online
2009-02-05
DOI
10.1016/j.apsusc.2009.01.075

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