Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition

Evolution of Crystal Structure During the Initial Stages of ZnO Atomic Layer Deposition

(2016) R. Boichot et al.   CHEMISTRY OF MATERIALS

A Case Study of ALD Encapsulation of Quantum Dots: Embedding Supported CdSe/CdS/ZnS Quantum Dots in a ZnO Matrix

(2016) Kilian Devloo-Casier et al.   Journal of Physical Chemistry C

A versatile instrument for ambient pressure x-ray photoelectron spectroscopy: The Lund cell approach

(2016) Jan Knudsen et al.   SURFACE SCIENCE

Near Ambient Pressure X-ray Photoelectron Spectroscopy Study of the Atomic Layer Deposition of TiO2 on RuO2(110)

(2015) Ashley R. Head et al.   Journal of Physical Chemistry C

Overview of atomic layer etching in the semiconductor industry

(2015) Keren J. Kanarik et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

(2015) Jeffrey A. Klug et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Atomic layer deposition of ruthenium at 100 °C using the RuO4-precursor and H2

(2015) Matthias M. Minjauw et al.   Journal of Materials Chemistry C

Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma

(2015) Matthias M. Minjauw et al.   Journal of Materials Chemistry C

In situ XAS and XRF study of nanoparticle nucleation during O3-based Pt deposition

(2014) Matthias Filez et al.   CATALYSIS TODAY

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

(2014) Jolien Dendooven et al.   Nanoscale

An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis

(2014) Scott M. Geyer et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

In SituStudies on Reaction Mechanisms in Atomic Layer Deposition

(2013) Kjell Knapas et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

Polymer crystallization studies under processing-relevant conditions at the SAXS/WAXS DUBBLE beamline at the ESRF

(2013) Giuseppe Portale et al.   JOURNAL OF APPLIED CRYSTALLOGRAPHY

Fast pole figure acquisition using area detectors at the DiffAbs beamline – Synchrotron SOLEIL

(2013) Cristian Mocuta et al.   JOURNAL OF APPLIED CRYSTALLOGRAPHY

Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

(2013) Jolien Dendooven et al.   Journal of Physical Chemistry C

Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

(2013) Yu Lei et al.   Journal of Physical Chemistry C

In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition

(2013) Kilian Devloo-Casier et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic Layer Deposition of TiO2 on Surface Modified Nanoporous Low-k Films

(2013) Elisabeth Levrau et al.   LANGMUIR

From atoms to layers: in situ gold cluster growth kinetics during sputter deposition

(2013) Matthias Schwartzkopf et al.   Nanoscale

Portable atomic layer deposition reactor for in situ synchrotron photoemission studies

(2013) R. Methaapanon et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

In Vacuo Photoemission Studies of Platinum Atomic Layer Deposition Using Synchrotron Radiation

(2012) Scott M. Geyer et al.   Journal of Physical Chemistry Letters

In situALD experiments with synchrotron radiation photoelectron spectroscopy

(2012) Massimo Tallarida et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition: Initial growth of HfO2 on Si and Ge substrates

(2011) K. Devloo-Casier et al.   APPLIED PHYSICS LETTERS

Tailoring nanoporous materials by atomic layer deposition

(2011) Christophe Detavernier et al.   CHEMICAL SOCIETY REVIEWS

In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

(2011) Yong Jun Park et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO2 on Planar Substrates and in Nanoporous Films

(2011) Jolien Dendooven et al.   Journal of Physical Chemistry C

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

In situ synchrotron x-ray characterization of ZnO atomic layer deposition

(2010) D. D. Fong et al.   APPLIED PHYSICS LETTERS

Genesis and Evolution of Surface Species during Pt Atomic Layer Deposition on Oxide Supports Characterized by in Situ XAFS Analysis and Water−Gas Shift Reaction

(2010) Worajit Setthapun et al.   Journal of Physical Chemistry C

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Nanoscale Structure and Morphology of Atomic Layer Deposition Platinum on SrTiO3(001)

(2009) Steven T. Christensen et al.   CHEMISTRY OF MATERIALS

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering

(2009) Gilles Renaud et al.   SURFACE SCIENCE REPORTS

The initial atomic layer deposition of HfO2∕Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy

(2008) Massimo Tallarida et al.   JOURNAL OF APPLIED PHYSICS