Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

Published 2013 View Full Article

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Title
Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 117, Issue 21, Pages 11141-11148
Publisher
American Chemical Society (ACS)
Online
2013-05-04
DOI
10.1021/jp401196f

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