Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma

Atomic layer deposition of ruthenium at 100 °C using the RuO4-precursor and H2

(2015) Matthias M. Minjauw et al.   Journal of Materials Chemistry C

Atomic Layer Deposition of Noble Metals and Their Oxides

(2013) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Dehydrogenation Reactions during Atomic Layer Deposition of Ru Using O2

(2012) N. Leick et al.   CHEMISTRY OF MATERIALS

The low temperature atomic layer deposition of ruthenium and the effect of oxygen exposure

(2012) Rungthiwa Methaapanon et al.   JOURNAL OF MATERIALS CHEMISTRY

Kinetics of Reduction of a RuO2(110) Film on Ru(0001) by H2

(2012) D. Ugur et al.   Journal of Physical Chemistry C

Impact of the Plasma Ambient and the Ruthenium Precursor on the Growth of Ruthenium Films by Plasma Enhanced Atomic Layer Deposition

(2012) J. Swerts et al.   ECS Solid State Letters

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Growth of RuO2Thin Films by Pulsed-Chemical Vapor Deposition Using RuO4Precursor and 5% H2Reduction Gas

(2010) Jeong Hwan Han et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Texture of atomic layer deposited ruthenium

(2009) J. Musschoot et al.   MICROELECTRONIC ENGINEERING

Ru thin film grown on TaN by plasma enhanced atomic layer deposition

(2009) Qi Xie et al.   THIN SOLID FILMS

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4Precursor

(2008) Jeong Hwan Han et al.   CHEMISTRY OF MATERIALS

Atomic layer deposition of titanium nitride from TDMAT precursor

(2008) J. Musschoot et al.   MICROELECTRONIC ENGINEERING