Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 7, Pages 1065-1068Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2018.2832644
Keywords
SnO2/ZnO nanosheet arrays; core-shell nanostructures; atomic layer deposition; ethanol sensors
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Funding
- National Natural Science Foundation of China [51505209]
- Shenzhen Science and Technology Innovation Committee [JCYJ20170412154426330, KQTD2015071710313656]
- Guangdong Natural Science Funds for Distinguished Young Scholar [2016A030306042]
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In this letter, well-defined SnO2/ZnO core-shell nanosheet arrays (NSAs) are grown with an on-chip two-step process as gas sensing materials. A homogeneous precipitation method has been used to synthesize SnO2 NSAs, following by atomic layer deposition of ZnO. The SnO2/ZnO core-shell NSAs based sensor exhibits significantly enhanced ethanol sensing response (13.3 at 100 ppm) and selectivity at 350 degrees C, as compared with the pure SnO2 NSAs (2.7 at 100 ppm). The improvement of sensor performance can be ascribed to the SnO2/ZnO heterostructures formed in the core-shell NSAs, which suggests the promising application for MEMS compatible ethanol sensors.
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