“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication
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Title
“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication
Authors
Keywords
-
Journal
Microsystems & Nanoengineering
Volume 6, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2020-05-04
DOI
10.1038/s41378-020-0144-4
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