High-performance H 2 sensors with selectively hydrophobic micro-plate for self-aligned upload of Pd nanodots modified mesoporous In 2 O 3 sensing-material
High-performance H 2 sensors with selectively hydrophobic micro-plate for self-aligned upload of Pd nanodots modified mesoporous In 2 O 3 sensing-material
Authors
Keywords
Self-aligned, Upload, Patterned SAM, MEMS sensor, Mesoporous In, 2, O, 3
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