Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor
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Title
Unexpected and enhanced electrostatic adsorption capacity of oxygen vacancy-rich cobalt-doped In2O3 for high-sensitive MEMS toluene sensor
Authors
Keywords
Low-temperature electrostatic adsorption, In-situ doping, Surface oxygen vacancy, Toluene sensor, MEMS fabrication technology
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 342, Issue -, Pages 129949
Publisher
Elsevier BV
Online
2021-04-16
DOI
10.1016/j.snb.2021.129949
References
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