Potential of micrometer-sized graphite as a catalyst for chemical etching of silicon

Chemical etching of silicon assisted by graphene oxide

(2019) Wataru Kubota et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Carbon induced galvanic etching of silicon in aerated HF/H2O vapor

(2019) Ya Hu et al.   CORROSION SCIENCE

Spontaneous Symmetry Breaking of Nanoscale Spatiotemporal Pattern as the Origin of Helical Nanopore Etching in Silicon

(2019) Takumi Yasuda et al.   ACS Applied Materials & Interfaces

Chemical etching of a semiconductor surface assisted by single sheets of reduced graphene oxide

(2018) Tomoki Hirano et al.   CARBON

Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching

(2017) Hidetaka Asoh et al.   Nanoscale Research Letters

Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching

(2017) Hidetaka Asoh et al.   Nanoscale Research Letters

Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

(2016) Ruby A. Lai et al.   ACS Applied Materials & Interfaces

Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching

(2016) Sung-Soo Yoon et al.   APPLIED SURFACE SCIENCE

Graphene-Assisted Chemical Etching of Silicon Using Anodic Aluminum Oxides as Patterning Templates

(2015) Jungkil Kim et al.   ACS Applied Materials & Interfaces

Metal-assisted chemical etching of GaAs using Au catalyst deposited on the backside of a substrate

(2015) Hidetaka Asoh et al.   ELECTROCHIMICA ACTA

Porous silicon templates prepared by Cu-assisted chemical etching

(2014) Hui Zheng et al.   MATERIALS LETTERS

Inverse Metal-Assisted Chemical Etching Produces Smooth High Aspect Ratio InP Nanostructures

(2014) Seung Hyun Kim et al.   NANO LETTERS

Metal-assisted chemical etching of silicon and nanotechnology applications

(2014) Hee Han et al.   Nano Today

Bulk Micromachining of Si by Metal-assisted Chemical Etching

(2014) Sang-Mi Kim et al.   Small

Novel and low reflective silicon surface fabricated by Ni-assisted electroless etching and coated with atomic layer deposited Al2O3 film

(2013) Zhihao Yue et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Deep and vertical silicon bulk micromachining using metal assisted chemical etching

(2013) Mohammad Zahedinejad et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Sub-100-nm ordered silicon hole arrays by metal-assisted chemical etching

(2013) Hidetaka Asoh et al.   Nanoscale Research Letters

Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

(2012) Prayudi Lianto et al.   Nanoscale

Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching

(2012) Hidetaka Asoh et al.   Nanoscale Research Letters

Sub-micrometer-sized Graphite As a Conducting and Catalytic Counter Electrode for Dye-sensitized Solar Cells

(2011) Ganapathy Veerappan et al.   ACS Applied Materials & Interfaces

Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics

(2011) Xiuling Li   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon

(2011) Konrad Rykaczewski et al.   NANO LETTERS

Formation of High Aspect Ratio GaAs Nanostructures with Metal-Assisted Chemical Etching

(2011) Matt DeJarld et al.   NANO LETTERS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

Periodic GaAs Convex and Hole Arrays Produced by Metal-Assisted Chemical Etching

(2010) Yukiko Yasukawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Formation of Periodic Microbump Arrays by Metal-Assisted Photodissolution of InP

(2010) Hidetaka Asoh et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Metal-assisted electrochemical etching of silicon

(2010) Z P Huang et al.   NANOTECHNOLOGY

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Effect of noble metal catalyst species on the morphology of macroporous silicon formed by metal-assisted chemical etching

(2009) Hidetaka Asoh et al.   ELECTROCHIMICA ACTA

Site-Selective Metal Patterning/Metal-Assisted Chemical Etching on GaAs Substrate Through Colloidal Crystal Templating

(2009) Yukiko Yasukawa et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Site-selective chemical etching of GaAs through a combination of self-organized spheres and silver particles as etching catalyst

(2008) Yukiko Yasukawa et al.   ELECTROCHEMISTRY COMMUNICATIONS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA

Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts

(2008) Chia-Lung Lee et al.   JOURNAL OF MATERIALS CHEMISTRY

Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal-Assisted Chemical Etching

(2008) Ming-Liang Zhang et al.   Journal of Physical Chemistry C