Deep and vertical silicon bulk micromachining using metal assisted chemical etching

Published 2013 View Full Article

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Title
Deep and vertical silicon bulk micromachining using metal assisted chemical etching
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 5, Pages 055015
Publisher
IOP Publishing
Online
2013-04-04
DOI
10.1088/0960-1317/23/5/055015

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