A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere

Title
A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
Authors
Keywords
CVD, SEM, XRD, EDS, Nanoindentation
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 258, Issue -, Pages 123866
Publisher
Elsevier BV
Online
2020-09-29
DOI
10.1016/j.matchemphys.2020.123866

Ask authors/readers for more resources

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search