A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
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Title
A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
Authors
Keywords
CVD, SEM, XRD, EDS, Nanoindentation
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 258, Issue -, Pages 123866
Publisher
Elsevier BV
Online
2020-09-29
DOI
10.1016/j.matchemphys.2020.123866
References
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