Influence of ternary elements (X=Si, B, Cr) on TiAlN coating deposited by magnetron sputtering process with single alloying targets

Published 2013 View Full Article

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Title
Influence of ternary elements (X=Si, B, Cr) on TiAlN coating deposited by magnetron sputtering process with single alloying targets
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 546, Issue -, Pages 242-245
Publisher
Elsevier BV
Online
2013-05-17
DOI
10.1016/j.tsf.2013.05.046

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