A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
出版年份 2020 全文链接
标题
A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere
作者
关键词
CVD, SEM, XRD, EDS, Nanoindentation
出版物
MATERIALS CHEMISTRY AND PHYSICS
Volume 258, Issue -, Pages 123866
出版商
Elsevier BV
发表日期
2020-09-29
DOI
10.1016/j.matchemphys.2020.123866
参考文献
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